Near-field scanning optical microscopy (Nsom)

E. Betzig; M. Isaacson; H. Barshatzky; A. Lewis; K. Lin

doi:10.1117/12.944521

Near-field scanning optical microscopy (Nsom)

E. Betzig, M. Isaacson, H. Barshatzky, A. Lewis, K. Lin

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

Superresolution optical images have been generated with near-field scanning optical microscopy (NSOM). The underlying concept is presented and several modes of operation are discussed. A resolution based on edge sharpness of 70 nm or better has been demonstrated with two different instruments. Images have been obtained which characterize the resolution as a function of two critical parameters: the aperture size and the aperture-sample separation. The near-field images also illustrate novel features resulting from several forms of contrast. Finally, the potential of NSOM is compared with conventional lens-based forms of microscopy as well as with more recent scanned tip methods.

Original language	English
Pages (from-to)	91-99
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	897
DOIs	https://doi.org/10.1117/12.944521
State	Published - 12 Jul 1988
Externally published	Yes

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AU - Lin, K.

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Near-field scanning optical microscopy (Nsom)

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