On-chip beam positioning sensor via frequency locked cascaded ring resonators

Alex Naiman, Liron Stern, Uriel Levy

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


We demonstrate an approach for on-chip beam positioning with a position accuracy of up to 100 nm. This approach is based on tracking the resonance of two adjacent microring resonators that are implemented on a silicon on insulator chip. We demonstrate the functionality of our approach by illuminating the chip through a Near Field Scanning Optical Microscope tip and monitoring the shift of the microring resonances due to the thermo-optic effect. We also discuss the contribution of different effects such as free carrier absorption and dispersion to the resonance shift.

Original languageAmerican English
Article number201112
JournalApplied Physics Letters
Issue number20
StatePublished - 14 May 2018

Bibliographical note

Funding Information:
This research was supported by the Israeli Ministry of Science and Technology, and the device fabrication was made by TowerJazz FAB.

Publisher Copyright:
© 2018 Author(s).


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