On-chip switching of a silicon nitride micro-ring resonator based on digital microfluidics platform

Yoav Zuta*, Ilya Goykhman, Boris Desiatov, Uriel Levy

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

We demonstrate the switching of a silicon nitride micro ring resonator (MRR) by using digital microfluidics (DMF). Our platform allows driving micro-droplets on-chip, providing control over the effective refractive index at the vicinity of the resonator and thus facilitating the manipulation of the transmission spectrum of the MRR. The device is fabricated using a process that is compatible with high-throughput silicon fabrication techniques with buried highly doped silicon electrodes. This platform can be extended towards controlling arrays of micro optical devices using minute amounts of liquid droplets. Such an integration of DMF and optical resonators on chip can be used in variety of applications, ranging from biosensing and kinetics to tunable filtering on chip.

Original languageAmerican English
Pages (from-to)24762-24769
Number of pages8
JournalOptics Express
Volume18
Issue number24
DOIs
StatePublished - 22 Nov 2010

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