Optical MEMS devices for telecom systems

F. Pardo; V. A. Aksyuk; S. Arney; H. Bair; N. R. Basavanhally; D. J. Bishop; G. R. Bogart; C. A. Bolle; J. E. Bower; D. Carr; H. B. Chan; R. Cirelli; E. Ferry; R. Frahm; A. Gasparyan; J. V. Gates; C. R. Giles; L. Gomez; S. Goyal; D. S. Greywall; M. Haueis; R. C. Keller; J. Kim; F. P. Klemens; P. Kolodner; A. Kornblit; T. Kroupenkine; W. Lai; V. Lifton; J. Q. Liu; Y. Low; W. Mansfield; D. Marom; J. F. Miner; D. T. Neilson; M. Paczkowski; C. S. Pai; A. Ramirez; D. Ramsey; S. Rogers; R. Ryf; R. Scotti; H. Shea; M. E. Simon; H. T. Soh; H. Tang; J. A. Taylor; K. Teffeau; J. Vuillemin; J. Weld

doi:10.1117/12.499075

Optical MEMS devices for telecom systems

F. Pardo^*, V. A. Aksyuk, S. Arney, H. Bair, N. R. Basavanhally, D. J. Bishop, G. R. Bogart, C. A. Bolle, J. E. Bower, D. Carr, H. B. Chan, R. Cirelli, E. Ferry, R. Frahm, A. Gasparyan, J. V. Gates, C. R. Giles, L. Gomez, S. Goyal, D. S. GreywallM. Haueis, R. C. Keller, J. Kim, F. P. Klemens, P. Kolodner, A. Kornblit, T. Kroupenkine, W. Lai, V. Lifton, J. Q. Liu, Y. Low, W. Mansfield, D. Marom, J. F. Miner, D. T. Neilson, M. Paczkowski, C. S. Pai, A. Ramirez, D. Ramsey, S. Rogers, R. Ryf, R. Scotti, H. Shea, M. E. Simon, H. T. Soh, H. Tang, J. A. Taylor, K. Teffeau, J. Vuillemin, J. Weld

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

10 Scopus citations

Abstract

As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.

Original language	English
Pages (from-to)	435-444
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5116 II
DOIs	https://doi.org/10.1117/12.499075
State	Published - 2003
Externally published	Yes
Event	Smart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain Duration: 19 May 2003 → 21 May 2003

Keywords

Cross-connect
Optical MEMS
Optical add-drop
Wavelength switch

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1117/12.499075

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Pardo, F., Aksyuk, V. A., Arney, S., Bair, H., Basavanhally, N. R., Bishop, D. J., Bogart, G. R., Bolle, C. A., Bower, J. E., Carr, D., Chan, H. B., Cirelli, R., Ferry, E., Frahm, R., Gasparyan, A., Gates, J. V., Giles, C. R., Gomez, L., Goyal, S., ... Weld, J. (2003). Optical MEMS devices for telecom systems. Proceedings of SPIE - The International Society for Optical Engineering, 5116 II, 435-444. https://doi.org/10.1117/12.499075

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title = "Optical MEMS devices for telecom systems",

abstract = "As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.",

keywords = "Cross-connect, Optical MEMS, Optical add-drop, Wavelength switch",

author = "F. Pardo and Aksyuk, {V. A.} and S. Arney and H. Bair and Basavanhally, {N. R.} and Bishop, {D. J.} and Bogart, {G. R.} and Bolle, {C. A.} and Bower, {J. E.} and D. Carr and Chan, {H. B.} and R. Cirelli and E. Ferry and R. Frahm and A. Gasparyan and Gates, {J. V.} and Giles, {C. R.} and L. Gomez and S. Goyal and Greywall, {D. S.} and M. Haueis and Keller, {R. C.} and J. Kim and Klemens, {F. P.} and P. Kolodner and A. Kornblit and T. Kroupenkine and W. Lai and V. Lifton and Liu, {J. Q.} and Y. Low and W. Mansfield and D. Marom and Miner, {J. F.} and Neilson, {D. T.} and M. Paczkowski and Pai, {C. S.} and A. Ramirez and D. Ramsey and S. Rogers and R. Ryf and R. Scotti and H. Shea and Simon, {M. E.} and Soh, {H. T.} and H. Tang and Taylor, {J. A.} and K. Teffeau and J. Vuillemin and J. Weld",

year = "2003",

doi = "10.1117/12.499075",

language = "אנגלית",

volume = "5116 II",

pages = "435--444",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

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note = "Smart Sensors, Actuators, and MEMS ; Conference date: 19-05-2003 Through 21-05-2003",

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Pardo, F, Aksyuk, VA, Arney, S, Bair, H, Basavanhally, NR, Bishop, DJ, Bogart, GR, Bolle, CA, Bower, JE, Carr, D, Chan, HB, Cirelli, R, Ferry, E, Frahm, R, Gasparyan, A, Gates, JV, Giles, CR, Gomez, L, Goyal, S, Greywall, DS, Haueis, M, Keller, RC, Kim, J, Klemens, FP, Kolodner, P, Kornblit, A, Kroupenkine, T, Lai, W, Lifton, V, Liu, JQ, Low, Y, Mansfield, W, Marom, D, Miner, JF, Neilson, DT, Paczkowski, M, Pai, CS, Ramirez, A, Ramsey, D, Rogers, S, Ryf, R, Scotti, R, Shea, H, Simon, ME, Soh, HT, Tang, H, Taylor, JA, Teffeau, K, Vuillemin, J & Weld, J 2003, 'Optical MEMS devices for telecom systems', Proceedings of SPIE - The International Society for Optical Engineering, vol. 5116 II, pp. 435-444. https://doi.org/10.1117/12.499075

TY - JOUR

T1 - Optical MEMS devices for telecom systems

AU - Pardo, F.

AU - Aksyuk, V. A.

AU - Arney, S.

AU - Bair, H.

AU - Basavanhally, N. R.

AU - Bishop, D. J.

AU - Bogart, G. R.

AU - Bolle, C. A.

AU - Bower, J. E.

AU - Carr, D.

AU - Chan, H. B.

AU - Cirelli, R.

AU - Ferry, E.

AU - Frahm, R.

AU - Gasparyan, A.

AU - Gates, J. V.

AU - Giles, C. R.

AU - Gomez, L.

AU - Goyal, S.

AU - Greywall, D. S.

AU - Haueis, M.

AU - Keller, R. C.

AU - Kim, J.

AU - Klemens, F. P.

AU - Kolodner, P.

AU - Kornblit, A.

AU - Kroupenkine, T.

AU - Lai, W.

AU - Lifton, V.

AU - Liu, J. Q.

AU - Low, Y.

AU - Mansfield, W.

AU - Marom, D.

AU - Miner, J. F.

AU - Neilson, D. T.

AU - Paczkowski, M.

AU - Pai, C. S.

AU - Ramirez, A.

AU - Ramsey, D.

AU - Rogers, S.

AU - Ryf, R.

AU - Scotti, R.

AU - Shea, H.

AU - Simon, M. E.

AU - Soh, H. T.

AU - Tang, H.

AU - Taylor, J. A.

AU - Teffeau, K.

AU - Vuillemin, J.

AU - Weld, J.

PY - 2003

Y1 - 2003

N2 - As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.

AB - As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.

KW - Cross-connect

KW - Optical MEMS

KW - Optical add-drop

KW - Wavelength switch

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DO - 10.1117/12.499075

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AN - SCOPUS:0042329513

SN - 0277-786X

VL - 5116 II

SP - 435

EP - 444

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Sensors, Actuators, and MEMS

Y2 - 19 May 2003 through 21 May 2003

ER -

Optical MEMS devices for telecom systems

Abstract

Keywords

UN SDGs

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