Optical MEMS devices for telecom systems

F. Pardo*, V. A. Aksyuk, S. Arney, H. Bair, N. R. Basavanhally, D. J. Bishop, G. R. Bogart, C. A. Bolle, J. E. Bower, D. Carr, H. B. Chan, R. Cirelli, E. Ferry, R. Frahm, A. Gasparyan, J. V. Gates, C. R. Giles, L. Gomez, S. Goyal, D. S. GreywallM. Haueis, R. C. Keller, J. Kim, F. P. Klemens, P. Kolodner, A. Kornblit, T. Kroupenkine, W. Lai, V. Lifton, J. Q. Liu, Y. Low, W. Mansfield, D. Marom, J. F. Miner, D. T. Neilson, M. Paczkowski, C. S. Pai, A. Ramirez, D. Ramsey, S. Rogers, R. Ryf, R. Scotti, H. Shea, M. E. Simon, H. T. Soh, H. Tang, J. A. Taylor, K. Teffeau, J. Vuillemin, J. Weld

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations


As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.

Original languageAmerican English
Pages (from-to)435-444
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5116 II
StatePublished - 2003
Externally publishedYes
EventSmart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain
Duration: 19 May 200321 May 2003


  • Cross-connect
  • Optical MEMS
  • Optical add-drop
  • Wavelength switch


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