Optical MEMS devices for telecom systems

F. Pardo; V. A. Aksyuk; S. Arney; H. Bair; N. R. Basavanhally; D. J. Bishop; G. R. Bogart; C. A. Bolle; J. E. Bower; D. Carr; H. B. Chan; R. Cirelli; E. Ferry; R. Frahm; A. Gasparyan; J. V. Gates; C. R. Giles; L. Gomez; S. Goyal; D. S. Greywall; M. Haueis; R. C. Keller; J. Kim; F. P. Klemens; P. Kolodner; A. Kornblit; T. Kroupenkine; W. Lai; V. Lifton; J. Q. Liu; Y. Low; W. Mansfield; D. Marom; J. F. Miner; D. T. Neilson; M. Paczkowski; C. S. Pai; A. Ramirez; D. Ramsey; S. Rogers; R. Ryf; R. Scotti; H. Shea; M. E. Simon; H. T. Soh; H. Tang; J. A. Taylor; K. Teffeau; J. Vuillemin; J. Weld

doi:10.1117/12.499075

Optical MEMS devices for telecom systems

F. Pardo^*
, V. A. Aksyuk
, S. Arney
, H. Bair
, N. R. Basavanhally
, D. J. Bishop
, G. R. Bogart
, C. A. Bolle
, J. E. Bower
, D. Carr
, H. B. Chan
, R. Cirelli
, E. Ferry
, R. Frahm
, A. Gasparyan
, J. V. Gates
, C. R. Giles
, L. Gomez
, S. Goyal
, D. S. Greywall

M. Haueis, R. C. Keller, J. Kim, F. P. Klemens, P. Kolodner, A. Kornblit, T. Kroupenkine, W. Lai, V. Lifton, J. Q. Liu, Y. Low, W. Mansfield, D. Marom, J. F. Miner, D. T. Neilson, M. Paczkowski, C. S. Pai, A. Ramirez, D. Ramsey, S. Rogers, R. Ryf, R. Scotti, H. Shea, M. E. Simon, H. T. Soh, H. Tang, J. A. Taylor, K. Teffeau, J. Vuillemin, J. Weld

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

10 Scopus citations

Abstract

As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.

Original language	English
Pages (from-to)	435-444
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5116 II
DOIs	https://doi.org/10.1117/12.499075
State	Published - 2003
Externally published	Yes
Event	Smart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain Duration: 19 May 2003 → 21 May 2003

Keywords

Cross-connect
Optical MEMS
Optical add-drop
Wavelength switch

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1117/12.499075

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Pardo, F., Aksyuk, V. A., Arney, S., Bair, H., Basavanhally, N. R., Bishop, D. J., Bogart, G. R., Bolle, C. A., Bower, J. E., Carr, D., Chan, H. B., Cirelli, R., Ferry, E., Frahm, R., Gasparyan, A., Gates, J. V., Giles, C. R., Gomez, L., Goyal, S., ... Weld, J. (2003). Optical MEMS devices for telecom systems. Proceedings of SPIE - The International Society for Optical Engineering, 5116 II, 435-444. https://doi.org/10.1117/12.499075

@article{05b99f1c692a460a85081a5841d71de2,

title = "Optical MEMS devices for telecom systems",

abstract = "As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.",

keywords = "Cross-connect, Optical MEMS, Optical add-drop, Wavelength switch",

author = "F. Pardo and Aksyuk, \{V. A.\} and S. Arney and H. Bair and Basavanhally, \{N. R.\} and Bishop, \{D. J.\} and Bogart, \{G. R.\} and Bolle, \{C. A.\} and Bower, \{J. E.\} and D. Carr and Chan, \{H. B.\} and R. Cirelli and E. Ferry and R. Frahm and A. Gasparyan and Gates, \{J. V.\} and Giles, \{C. R.\} and L. Gomez and S. Goyal and Greywall, \{D. S.\} and M. Haueis and Keller, \{R. C.\} and J. Kim and Klemens, \{F. P.\} and P. Kolodner and A. Kornblit and T. Kroupenkine and W. Lai and V. Lifton and Liu, \{J. Q.\} and Y. Low and W. Mansfield and D. Marom and Miner, \{J. F.\} and Neilson, \{D. T.\} and M. Paczkowski and Pai, \{C. S.\} and A. Ramirez and D. Ramsey and S. Rogers and R. Ryf and R. Scotti and H. Shea and Simon, \{M. E.\} and Soh, \{H. T.\} and H. Tang and Taylor, \{J. A.\} and K. Teffeau and J. Vuillemin and J. Weld",

year = "2003",

doi = "10.1117/12.499075",

language = "אנגלית",

volume = "5116 II",

pages = "435--444",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Smart Sensors, Actuators, and MEMS ; Conference date: 19-05-2003 Through 21-05-2003",

}

Pardo, F, Aksyuk, VA, Arney, S, Bair, H, Basavanhally, NR, Bishop, DJ, Bogart, GR, Bolle, CA, Bower, JE, Carr, D, Chan, HB, Cirelli, R, Ferry, E, Frahm, R, Gasparyan, A, Gates, JV, Giles, CR, Gomez, L, Goyal, S, Greywall, DS, Haueis, M, Keller, RC, Kim, J, Klemens, FP, Kolodner, P, Kornblit, A, Kroupenkine, T, Lai, W, Lifton, V, Liu, JQ, Low, Y, Mansfield, W, Marom, D, Miner, JF, Neilson, DT, Paczkowski, M, Pai, CS, Ramirez, A, Ramsey, D, Rogers, S, Ryf, R, Scotti, R, Shea, H, Simon, ME, Soh, HT, Tang, H, Taylor, JA, Teffeau, K, Vuillemin, J & Weld, J 2003, 'Optical MEMS devices for telecom systems', Proceedings of SPIE - The International Society for Optical Engineering, vol. 5116 II, pp. 435-444. https://doi.org/10.1117/12.499075

TY - JOUR

T1 - Optical MEMS devices for telecom systems

AU - Pardo, F.

AU - Aksyuk, V. A.

AU - Arney, S.

AU - Bair, H.

AU - Basavanhally, N. R.

AU - Bishop, D. J.

AU - Bogart, G. R.

AU - Bolle, C. A.

AU - Bower, J. E.

AU - Carr, D.

AU - Chan, H. B.

AU - Cirelli, R.

AU - Ferry, E.

AU - Frahm, R.

AU - Gasparyan, A.

AU - Gates, J. V.

AU - Giles, C. R.

AU - Gomez, L.

AU - Goyal, S.

AU - Greywall, D. S.

AU - Haueis, M.

AU - Keller, R. C.

AU - Kim, J.

AU - Klemens, F. P.

AU - Kolodner, P.

AU - Kornblit, A.

AU - Kroupenkine, T.

AU - Lai, W.

AU - Lifton, V.

AU - Liu, J. Q.

AU - Low, Y.

AU - Mansfield, W.

AU - Marom, D.

AU - Miner, J. F.

AU - Neilson, D. T.

AU - Paczkowski, M.

AU - Pai, C. S.

AU - Ramirez, A.

AU - Ramsey, D.

AU - Rogers, S.

AU - Ryf, R.

AU - Scotti, R.

AU - Shea, H.

AU - Simon, M. E.

AU - Soh, H. T.

AU - Tang, H.

AU - Taylor, J. A.

AU - Teffeau, K.

AU - Vuillemin, J.

AU - Weld, J.

PY - 2003

Y1 - 2003

N2 - As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.

AB - As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.

KW - Cross-connect

KW - Optical MEMS

KW - Optical add-drop

KW - Wavelength switch

UR - https://www.scopus.com/pages/publications/0042329513

U2 - 10.1117/12.499075

DO - 10.1117/12.499075

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.conferencearticle???

AN - SCOPUS:0042329513

SN - 0277-786X

VL - 5116 II

SP - 435

EP - 444

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Sensors, Actuators, and MEMS

Y2 - 19 May 2003 through 21 May 2003

ER -

Optical MEMS devices for telecom systems

Abstract

Keywords

UN SDGs

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