Optical MEMS devices for telecom systems

F. Pardo*, V. A. Aksyuk, S. Arney, H. Bair, N. R. Basavanhally, D. J. Bishop, G. R. Bogart, C. A. Bolle, J. E. Bower, D. Carr, H. B. Chan, R. Cirelli, E. Ferry, R. Frahm, A. Gasparyan, J. V. Gates, C. R. Giles, L. Gomez, S. Goyal, D. S. GreywallM. Haueis, R. C. Keller, J. Kim, F. P. Klemens, P. Kolodner, A. Kornblit, T. Kroupenkine, W. Lai, V. Lifton, J. Q. Liu, Y. Low, W. Mansfield, D. Marom, J. F. Miner, D. T. Neilson, M. Paczkowski, C. S. Pai, A. Ramirez, D. Ramsey, S. Rogers, R. Ryf, R. Scotti, H. Shea, M. E. Simon, H. T. Soh, H. Tang, J. A. Taylor, K. Teffeau, J. Vuillemin, J. Weld

*Corresponding author for this work

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Engineering

Physics

Material Science