Ordered arrays of Si nanocrystals in SiO2: Structural, optical, and electronic properties

I. V. Antonova, V. A. Skuratov, J. Jedrzejewski, I. Balberg

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

It is found that irradiation of SiO2 layers containing Si nanocrystals with high-energy heavy ions induces profound structural modifications-specifically, the formation of vertically ordered arrays of nanocrystals along the ion tracks. This effect results in substantial changes in the electrical properties (the conductivity and capacitance-voltage characteristics) and optical (photoluminescence) properties of the layers containing nanocrystals.

Original languageEnglish
Pages (from-to)482-487
Number of pages6
JournalSemiconductors
Volume44
Issue number4
DOIs
StatePublished - 2010

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