Parabolic tapered photonic crystal cavity in silicon

Boris Desiatov, Ilya Goykhman, Uriel Levy*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

We demonstrate the design, fabrication, transmission spectrum measurement, and near-field characterization of a parabolic tapered one-dimensional photonic crystal cavity in silicon. The results shows a relatively high quality factor (∼43 000), together with a small modal volume of ∼ 1. 1 (λ/n) 3. Moreover, the design allows repeatable device fabrication, as evident by the similar characteristics obtained for several tens of devices that were fabricated and tested. These demonstrated 1D PhC cavities may be used as a building block in integrated photonic circuits for optical on-chip interconnects and sensing applications.

Original languageAmerican English
Article number041112
JournalApplied Physics Letters
Volume100
Issue number4
DOIs
StatePublished - 23 Jan 2012

Bibliographical note

Funding Information:
The authors acknowledge technical support from David Shlosberg and Noa Mazursky. The research was supported in parts by the U.S-Israel binational science foundation, and the Israeli Science Foundation. Boris Desiatov and Ilya Goykhman acknowledge the Eshkol fellowship from the Israeli Ministry of Science and Technology. The devices were fabricated at the Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem.

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