Patterning thin metallic film via laser structured weakly bound template

Gabriel Kerner, Ori Stein, Micha Asscher*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

A weakly bound buffer material is structured on a surface by interfering low power laser beams, as a template for patterning metallic thin films deposited on top. The excess buffer material and metal layer are subsequently removed by a second uniform laser pulse. This laser pre-structured buffer layer assisted patterning procedure is demonstrated for gold layer forming a grating on a single crystal Ru(1 0 0) under UHV conditions, using Xe as the buffer material. Millimeters long, submicron (0.65 μm) wide wires can be obtained using laser wavelength of 1.064 μm with sharp edges of less than 30 nm, as determined by AFM. This method provides an all-in-vacuum metallic film patterning procedure at the submicron range, with the potential to be developed down to the nanometer scale upon decreasing the patterning laser wavelength down to the UV range.

Original languageEnglish
Pages (from-to)2091-2095
Number of pages5
JournalSurface Science
Volume600
Issue number10
DOIs
StatePublished - 15 May 2006

Keywords

  • Laser patterning
  • LITD
  • Weakly bound buffer layer

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