Peak reflectivity measurements of W/C, Mo/Si, and Mo/B4C multilayer mirrors in the 8-190-Å range using both K± line and synchrotron radiation

Andrew P. Zwicker, Sean P. Regan, Michael Finkenthal, H. Warren Moos, B. Saloman, Richard Watts, James R. Roberts

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

Peak reflectivity measurements of W/C, Mo/Si, and M0/B4C multilayer mirrors have been performed using line and synchrotron radiation in the 8—190 Å wavelength range. Short wavelength measurements using a line source were corrected for nonmonochromatic and divergent incident radiation. Reflectivities of Mo/Si mirrors, measured with synchrotron radiation, ranged from 25 to 44% but decreased significantly around the Si absorption edge. M0/B4C multilayer mirrors were measured that had peak reflectivities from 10 to 25% between 90 and 200 Å and bandpasses as small as 3 Å.

Original languageEnglish
Pages (from-to)3694-3698
Number of pages5
JournalApplied Optics
Volume29
Issue number25
DOIs
StatePublished - Sep 1990
Externally publishedYes

Keywords

  • Multilayer mirrors
  • Peak reflectivity

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