Abstract
Peak reflectivity measurements of W/C, Mo/Si, and M0/B4C multilayer mirrors have been performed using line and synchrotron radiation in the 8—190 Å wavelength range. Short wavelength measurements using a line source were corrected for nonmonochromatic and divergent incident radiation. Reflectivities of Mo/Si mirrors, measured with synchrotron radiation, ranged from 25 to 44% but decreased significantly around the Si absorption edge. M0/B4C multilayer mirrors were measured that had peak reflectivities from 10 to 25% between 90 and 200 Å and bandpasses as small as 3 Å.
Original language | English |
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Pages (from-to) | 3694-3698 |
Number of pages | 5 |
Journal | Applied Optics |
Volume | 29 |
Issue number | 25 |
DOIs | |
State | Published - Sep 1990 |
Externally published | Yes |
Keywords
- Multilayer mirrors
- Peak reflectivity