Abstract
The enhancement of the Raman intensity from porous layer compared to the signal from the silicon substrate was observed. It is assumed that this phenomenon is due to the specific form of pores that leads to the optical effect of focusing of scattered light near the bottom of the macropores. It was shown that peak position and shape of Raman line depend on the nanostructure of pore bottom.
Original language | English |
---|---|
Title of host publication | ASDAM 2000 - Conference Proceedings |
Subtitle of host publication | 3rd International EuroConference on Advanced Semiconductor Devices and Microsystems |
Editors | Jan Kuzmik, Jozef Osvald, Stefan Hascik, Juraj Breza |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 339-342 |
Number of pages | 4 |
ISBN (Electronic) | 0780359399, 9780780359390 |
DOIs | |
State | Published - 2000 |
Event | 3rd International EuroConference on Advanced Semiconductor Devices and Microsystems, ASDAM 2003 - Smolenice, Slovakia Duration: 16 Oct 2000 → 18 Oct 2000 |
Publication series
Name | ASDAM 2000 - Conference Proceedings: 3rd International EuroConference on Advanced Semiconductor Devices and Microsystems |
---|
Conference
Conference | 3rd International EuroConference on Advanced Semiconductor Devices and Microsystems, ASDAM 2003 |
---|---|
Country/Territory | Slovakia |
City | Smolenice |
Period | 16/10/00 → 18/10/00 |
Bibliographical note
Publisher Copyright:© 2000 IEEE.