Photoluminescence of silicon oxide films enriched by Si or Ge

T. V. Torchynska, J. Aguilar-Hernandez, L. Schacht Hernández, Y. Goldstein*, A. Many, J. Jedrzejewski, A. V. Kolobov

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations

Abstract

Photoluminescence (PL) and Raman spectra of silicon oxide films enriched by Si or Ge have been investigated before and after thermal annealing at 1150°C and 800°C, respectively. The dependences of PL peculiarities on the concentration of Si and Ge, as well as on the existence (or absence) of Si (Ge) quantum dots in silicon oxide films are analyzed. It is concluded that the PL spectrum of the oxide films enriched with Ge and at least the high-energy part of the spectrum of the films enriched with Si are due to defects in the silicon oxide films.

Original languageEnglish
Pages (from-to)557-561
Number of pages5
JournalJournal of Luminescence
Volume102-103
Issue numberSPEC
DOIs
StatePublished - May 2003
EventProceedings of the 2002 International Conference on Luminescence - Budapest, Hungary
Duration: 24 Aug 200229 Aug 2002

Keywords

  • Nanocrystalline Ge
  • Nanocrystalline Si
  • Photoluminescence
  • Quantum confinement

Fingerprint

Dive into the research topics of 'Photoluminescence of silicon oxide films enriched by Si or Ge'. Together they form a unique fingerprint.

Cite this