Abstract
A recently constructed calibration facility utilizing a Manson Soft X-ray Line Source in the wavelength range of 8-114Å and a Penning Ionization Discharge (PID) in the 100-350 Å range, has been used to map the reflectivity across a spherically curved (50cm radius of curvature) Layered Synthetic Microstructure (LSM) Mo/Si coated surface. This calibrated mirror (37% reflectivity with a 10Å bandpass at λ=175Å) was also used to image the Alin emission (λ= 170-175Å) from the PID.
Original language | English |
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Pages (from-to) | 322-326 |
Number of pages | 5 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 1546 |
DOIs | |
State | Published - 1 Jan 1992 |
Event | Multilayer and Grazing Incidence X-Ray/EUV Optics 1991 - San Diego, United States Duration: 21 Jul 1991 → … |
Bibliographical note
Publisher Copyright:© 1992 SPIE. All rights reserved.