Post processing resonance trimming of a silicon micro-ring resonator using flash memory technology

Meir Grajower, Noa Mazursky, Joseph Shappir, Uriel Levy

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A new post processing approach for resonance trimming of a micro-ring resonator is presented. The approach is based on charge trapping in thin layer of silicon nitride as done in Flash memories device.

Original languageEnglish
Title of host publication2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-2
Number of pages2
ISBN (Electronic)9781943580279
DOIs
StatePublished - 25 Oct 2017
Event2017 Conference on Lasers and Electro-Optics, CLEO 2017 - San Jose, United States
Duration: 14 May 201719 May 2017

Publication series

Name2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
Volume2017-January

Conference

Conference2017 Conference on Lasers and Electro-Optics, CLEO 2017
Country/TerritoryUnited States
CitySan Jose
Period14/05/1719/05/17

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

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