Post processing resonance trimming of a silicon micro-ring resonator using Flash memory technology

Meir Grajower, Noa mazursky, Joseph Shappir, Uriel Levy

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

A new post processing approach for resonance trimming of a micro-ring resonator is presented. The approach is based on charge trapping in thin layer of silicon nitride as done in Flash memories device.

Original languageAmerican English
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2017
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580279
DOIs
StatePublished - 2017
EventCLEO: Science and Innovations, CLEO_SI 2017 - San Jose, United States
Duration: 14 May 201719 May 2017

Publication series

NameOptics InfoBase Conference Papers
VolumePart F41-CLEO_SI 2017
ISSN (Electronic)2162-2701

Conference

ConferenceCLEO: Science and Innovations, CLEO_SI 2017
Country/TerritoryUnited States
CitySan Jose
Period14/05/1719/05/17

Bibliographical note

Publisher Copyright:
© 2017 OSA.

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