Post processing resonance trimming of a silicon micro-ring resonator using Flash memory technology

Meir Grajower; Noa mazursky; Joseph Shappir; Uriel Levy

doi:10.1364/CLEO_SI.2017.SM1N.5

Post processing resonance trimming of a silicon micro-ring resonator using Flash memory technology

Meir Grajower, Noa mazursky, Joseph Shappir, Uriel Levy

Department of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

A new post processing approach for resonance trimming of a micro-ring resonator is presented. The approach is based on charge trapping in thin layer of silicon nitride as done in Flash memories device.

Original language	English
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO_SI 2017
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580279
DOIs	https://doi.org/10.1364/CLEO_SI.2017.SM1N.5
State	Published - 2017
Event	CLEO: Science and Innovations, CLEO_SI 2017 - San Jose, United States Duration: 14 May 2017 → 19 May 2017

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F41-CLEO_SI 2017
ISSN (Electronic)	2162-2701

Conference

Conference	CLEO: Science and Innovations, CLEO_SI 2017
Country/Territory	United States
City	San Jose
Period	14/05/17 → 19/05/17

Bibliographical note

Publisher Copyright:
© 2017 OSA.

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10.1364/CLEO_SI.2017.SM1N.5

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title = "Post processing resonance trimming of a silicon micro-ring resonator using Flash memory technology",

abstract = "A new post processing approach for resonance trimming of a micro-ring resonator is presented. The approach is based on charge trapping in thin layer of silicon nitride as done in Flash memories device.",

author = "Meir Grajower and Noa mazursky and Joseph Shappir and Uriel Levy",

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year = "2017",

doi = "10.1364/CLEO_SI.2017.SM1N.5",

language = "אנגלית",

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Grajower, M, mazursky, N, Shappir, J & Levy, U 2017, Post processing resonance trimming of a silicon micro-ring resonator using Flash memory technology. in CLEO: Science and Innovations, CLEO_SI 2017. Optics InfoBase Conference Papers, vol. Part F41-CLEO_SI 2017, Optica Publishing Group (formerly OSA), CLEO: Science and Innovations, CLEO_SI 2017, San Jose, United States, 14/05/17. https://doi.org/10.1364/CLEO_SI.2017.SM1N.5

Post processing resonance trimming of a silicon micro-ring resonator using Flash memory technology. / Grajower, Meir; mazursky, Noa; Shappir, Joseph et al.
CLEO: Science and Innovations, CLEO_SI 2017. Optica Publishing Group (formerly OSA), 2017. (Optics InfoBase Conference Papers; Vol. Part F41-CLEO_SI 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - A new post processing approach for resonance trimming of a micro-ring resonator is presented. The approach is based on charge trapping in thin layer of silicon nitride as done in Flash memories device.

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Y2 - 14 May 2017 through 19 May 2017

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Post processing resonance trimming of a silicon micro-ring resonator using Flash memory technology

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