Preparation and characterization of ultra-thin sol-gel films

Leora Shapiro, Sharon Marx, Daniel Mandler*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Scopus citations


The formation and characterization of nanometer thick sol-gel films are reported. The films were prepared by spin-coating of a diluted solution of a silane precursor on a number of different substrates. The effect of dilution, rotation speed and nature of substrate on the thickness and homogeneity of the films was examined. Characterization of the films was carried out by profilometry, reflectance spectroscopy, atomic force microscopy, adhesion test and electrochemistry. We find that the dilution factor has a pronounced effect on the film thickness. Moreover, the time of dilution, namely, whether dilution was carried out before or after a period of hydrolysis, has a noticeable effect on the thickness as well as on the permeability of embedded species.

Original languageAmerican English
Pages (from-to)4624-4628
Number of pages5
JournalThin Solid Films
Issue number11
StatePublished - 9 Apr 2007

Bibliographical note

Funding Information:
This work was supported by the Ministry of Science under the Infrastructure program.


  • Electrochemistry
  • Silane
  • Sol-gel
  • Ultra-thin films


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