Pressure-driven devices with lithographically fabricated composite epoxy-elastomer membranes

Kyle Campbell; Uriel Levy; Yeshaiahu Fainman; Alex Groisman

doi:10.1063/1.2361169

Pressure-driven devices with lithographically fabricated composite epoxy-elastomer membranes

Kyle Campbell, Uriel Levy, Yeshaiahu Fainman, Alex Groisman^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

The authors describe the fabrication and applications of composite membranes with lithographically defined pieces of rigid UV-cured epoxy grafted inside a flexible polydimethylsiloxane membrane. The pattern of epoxy in the membrane defines its mode of deformation under pressure. They constructed and characterized two devices with the composite membranes. In one device, the grafted pieces of epoxy focus the pressure-induced membrane extension to a thin strip, and in the other device, the epoxy pattern generates in-plane rotation of the membrane under pressure. The proposed composite membranes can be used in pressure-driven actuators and adaptive optical devices.

Original language	English
Article number	154105
Journal	Applied Physics Letters
Volume	89
Issue number	15
DOIs	https://doi.org/10.1063/1.2361169
State	Published - 2006
Externally published	Yes

Bibliographical note

Funding Information:
The project was supported by the DARPA Center for Opto-Fluidic Integration, http://www.optofluidics.caltech.edu, and by NSF Grant No. OCE 04-28900.

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abstract = "The authors describe the fabrication and applications of composite membranes with lithographically defined pieces of rigid UV-cured epoxy grafted inside a flexible polydimethylsiloxane membrane. The pattern of epoxy in the membrane defines its mode of deformation under pressure. They constructed and characterized two devices with the composite membranes. In one device, the grafted pieces of epoxy focus the pressure-induced membrane extension to a thin strip, and in the other device, the epoxy pattern generates in-plane rotation of the membrane under pressure. The proposed composite membranes can be used in pressure-driven actuators and adaptive optical devices.",

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AU - Levy, Uriel

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AB - The authors describe the fabrication and applications of composite membranes with lithographically defined pieces of rigid UV-cured epoxy grafted inside a flexible polydimethylsiloxane membrane. The pattern of epoxy in the membrane defines its mode of deformation under pressure. They constructed and characterized two devices with the composite membranes. In one device, the grafted pieces of epoxy focus the pressure-induced membrane extension to a thin strip, and in the other device, the epoxy pattern generates in-plane rotation of the membrane under pressure. The proposed composite membranes can be used in pressure-driven actuators and adaptive optical devices.

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Pressure-driven devices with lithographically fabricated composite epoxy-elastomer membranes

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Bibliographical note

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