Realization of submicron-scale square-like silicon waveguide via optimized LOCOS process

Boris Desiatov, Ilya Goykhman, Uriel Levy

Research output: Contribution to journalConference articlepeer-review

Abstract

We demonstrate the design, fabrication and experimental characterization of submicron-scale silicon waveguide fabricated by local oxidation of silicon and provide guidelines for controlling its profile. Near field measurements shows submicron confinement of the optical mode.

Original languageAmerican English
JournalOptics InfoBase Conference Papers
StatePublished - 2010
EventFrontiers in Optics, FiO 2010 - Rochester, NY, United States
Duration: 24 Oct 201028 Oct 2010

Fingerprint

Dive into the research topics of 'Realization of submicron-scale square-like silicon waveguide via optimized LOCOS process'. Together they form a unique fingerprint.

Cite this