Replenish and relax: Explaining logarithmic annealing in ion-implanted c-Si

Laurent Karim Béland^*, Yonathan Anahory, Dries Smeets, Matthieu Guihard, Peter Brommer, Jean François Joly, Jean Christophe Pothier, Laurent J. Lewis, Normand Mousseau, François Schiettekatte

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review