Abstract
We study experimentally the effect of oxide removal on the sub-bandgap photodetection in silicon waveguides at the telecom wavelength regime. Depassivating the device allows for the enhancement of the quantum efficiency by about 2-3 times. Furthermore, the propagation loss within the device is significantly reduced by the oxide removal. Measuring the device 60 days after the depassivation shows slight differences. We provide a possible explanation for these observations. Clearly, passivation and depassivation play an essential role in the design and the implementation of such sub-bandgap photodetector devices for applications such as on-chip light monitoring.
Original language | American English |
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Pages (from-to) | 2128-2131 |
Number of pages | 4 |
Journal | Optics Letters |
Volume | 45 |
Issue number | 7 |
DOIs | |
State | Published - 1 Apr 2020 |
Bibliographical note
Funding Information:We acknowledge financial support from the Israeli-U.S. Binational Science Foundation (BSF), the PetaCloud consortium of the Israeli Innovation Authority. R.G. acknowledges the Israeli Ministry of Science for the Shulamit Aloni fellowship.
Funding Information:
Acknowledgment. We acknowledge financial support from the Israeli–U.S. Binational Science Foundation (BSF), the PetaCloud consortium of the Israeli Innovation Authority. R.G. acknowledges the Israeli Ministry of Science for the Shulamit Aloni fellowship.
Publisher Copyright:
© 2020 Optical Society of America