Role of surface passivation in integrated sub-bandgap silicon photodetection

Rivka Gherabli, Meir Grajower, Joseph Shappir, Noa Mazurski, Menachem Wofsy, Naor Inbar, Jacob B. Khurgin, Uriel Levy

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

We study experimentally the effect of oxide removal on the sub-bandgap photodetection in silicon waveguides at the telecom wavelength regime. Depassivating the device allows for the enhancement of the quantum efficiency by about 2-3 times. Furthermore, the propagation loss within the device is significantly reduced by the oxide removal. Measuring the device 60 days after the depassivation shows slight differences. We provide a possible explanation for these observations. Clearly, passivation and depassivation play an essential role in the design and the implementation of such sub-bandgap photodetector devices for applications such as on-chip light monitoring.

Original languageAmerican English
Pages (from-to)2128-2131
Number of pages4
JournalOptics Letters
Volume45
Issue number7
DOIs
StatePublished - 1 Apr 2020

Bibliographical note

Funding Information:
We acknowledge financial support from the Israeli-U.S. Binational Science Foundation (BSF), the PetaCloud consortium of the Israeli Innovation Authority. R.G. acknowledges the Israeli Ministry of Science for the Shulamit Aloni fellowship.

Funding Information:
Acknowledgment. We acknowledge financial support from the Israeli–U.S. Binational Science Foundation (BSF), the PetaCloud consortium of the Israeli Innovation Authority. R.G. acknowledges the Israeli Ministry of Science for the Shulamit Aloni fellowship.

Publisher Copyright:
© 2020 Optical Society of America

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