Scanning Electrochemical Microscopy: The Application of the Feedback Mode for High Resolution Copper Etching

Daniel Mandler, Allen J. Bard

Research output: Contribution to journalArticlepeer-review

110 Scopus citations
Original languageAmerican English
Pages (from-to)3143-3144
Number of pages2
JournalJournal of the Electrochemical Society
Volume136
Issue number10
DOIs
StatePublished - Oct 1989
Externally publishedYes

Keywords

  • microscope
  • scanning electrochemical
  • ultramicroelectrode

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