Silicon Rich Nitride Huygens Metasurface in the Visible Regime

Oren Goldberg; Rivka Gherabli; Jinan Nijem; Noa Mazurski; Uriel Levy

doi:10.1364/CLEO_AT.2023.SW4P.6

Silicon Rich Nitride Huygens Metasurface in the Visible Regime

Oren Goldberg, Rivka Gherabli, Jinan Nijem, Noa Mazurski, Uriel Levy

Department of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We experimentally demonstrate a Huygens metasurface in the visible regime utilizing Silicon rich Nitride (SRN). Offering high refractive index and CMOS compatibility, SRN is an outstanding candidate to replace the widely used TiO2.

Original language	English
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO:S and I 2023
Publisher	Optical Society of America
ISBN (Electronic)	9781957171258
DOIs	https://doi.org/10.1364/CLEO_AT.2023.SW4P.6
State	Published - 2023
Event	CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023 - San Jose, United States Duration: 7 May 2023 → 12 May 2023

Publication series

Name	CLEO: Science and Innovations, CLEO:S and I 2023

Conference

Conference	CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023
Country/Territory	United States
City	San Jose
Period	7/05/23 → 12/05/23

Bibliographical note

Publisher Copyright:
© 2023 The Author (s).

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10.1364/CLEO_AT.2023.SW4P.6

Cite this

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title = "Silicon Rich Nitride Huygens Metasurface in the Visible Regime",

abstract = "We experimentally demonstrate a Huygens metasurface in the visible regime utilizing Silicon rich Nitride (SRN). Offering high refractive index and CMOS compatibility, SRN is an outstanding candidate to replace the widely used TiO2.",

author = "Oren Goldberg and Rivka Gherabli and Jinan Nijem and Noa Mazurski and Uriel Levy",

note = "Publisher Copyright: {\textcopyright} 2023 The Author (s).; CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023 ; Conference date: 07-05-2023 Through 12-05-2023",

year = "2023",

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Goldberg, O, Gherabli, R, Nijem, J, Mazurski, N & Levy, U 2023, Silicon Rich Nitride Huygens Metasurface in the Visible Regime. in CLEO: Science and Innovations, CLEO:S and I 2023. CLEO: Science and Innovations, CLEO:S and I 2023, Optical Society of America, CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023, San Jose, United States, 7/05/23. https://doi.org/10.1364/CLEO_AT.2023.SW4P.6

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AU - Mazurski, Noa

AU - Levy, Uriel

PY - 2023

Y1 - 2023

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AB - We experimentally demonstrate a Huygens metasurface in the visible regime utilizing Silicon rich Nitride (SRN). Offering high refractive index and CMOS compatibility, SRN is an outstanding candidate to replace the widely used TiO2.

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PB - Optical Society of America

T2 - CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023

Y2 - 7 May 2023 through 12 May 2023

ER -

Silicon Rich Nitride Huygens Metasurface in the Visible Regime

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