Silicon Rich Nitride Huygens Metasurfaces in the Visible Regime

Oren Goldberg*, Rivka Gherabli, Jacob Engelberg, Jinan Nijem, Noa Mazurski, Uriel Levy*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


In recent years there has been a shift of interest in the Nanophotonics community moving from using metallic/plasmonic materials to using high-index dielectric materials for the construction of metasurfaces. Although high-index dielectrics hold many advantages over their plasmonic counterparts, the selection of materials that exhibit high-index properties, have low loss, and are complemetary metal-oxide-semiconductor (CMOS) compatible that also operate in the visible regime is extremely challenging. In this work, a high-index dielectric material using silicon rich nitride (SRN) is proposed and experimentally demonstrated as a platform for solving this problem. While SRN has been used before for diffractive lenses and structural colors, here its applicability for Huygens-type metasurfaces is focused upon. Specifically, a Huygens metasurface that operates in the visible range around a wavelength of 575 nm is theoretically and experimentally demonstrated, and the capabilities of spatially controlling the phase of this metasurface are further demonstrated by designing and fabricating a Huygens meta hologram. The study also shows that the refractive index can be controlled by the interplay between SiH4 and NH3 during the plasma-enhanced chemical vapor deposition (PECVD) process.

Original languageAmerican English
Article number2301612
JournalAdvanced Optical Materials
Issue number4
StatePublished - 2 Feb 2024

Bibliographical note

Publisher Copyright:
© 2023 The Authors. Advanced Optical Materials published by Wiley-VCH GmbH.


  • Huygens
  • dielectric metasurfaces
  • hologram
  • nanophotonics
  • silicon rich nitride


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