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SiOx layer formation during plasma sputtering of Si and SiO 2 targets

  • A. N. Karpov
  • , D. V. Marin
  • , V. A. Volodin
  • , J. Jedrzejewski
  • , G. A. Kachurin
  • , E. Savir
  • , N. L. Shwartz
  • , Z. Sh Yanovitskaya
  • , I. Balberg
  • , Y. Goldstein

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

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