Stability of emission properties of silicon nanostructures

M. Baran, L. Khomenkova, N. Korsunska, T. Stara, M. Sheinkman, V. Yukhymchuk, V. Khomenkov, Y. Goldstein, J. Jedrzejewski, E. Savir

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

The aging process of silicon nanostructures obtained by magnetron sputtering and electrochemical etching is investigated by photoluminescence and Raman scattering methods. It is shown that oxidation of silicon crystallites takes place in both types of structures and results in appearance of additional emission bands. However the degree of oxidation in etched structures exceeds significantly this value for sputtered samples. It is found that the intensity and spectral position of the emission band caused by exciton recombination in Si crystallites do not change practically during aging in sputtered structures in contrast to etched ones. It is shown that the oxidation of silicon amorphous phase occur during aging in sputtered structures.

Original languageEnglish
Title of host publicationGettering and Defect Engineering in Semiconductor Technology XI - GADEST 2005
EditorsB. Pichaud, A. Claverie, D. Alquier, H. Richter, M. Kittler, H. Richter, M. Kittler
PublisherTrans Tech Publications Ltd
Pages59-64
Number of pages6
ISBN (Print)9783908451136
DOIs
StatePublished - 2005
Event11th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology, GADEST 2005 - Giens, Marseilles, France
Duration: 25 Sep 200530 Sep 2005

Publication series

NameSolid State Phenomena
Volume108-109
ISSN (Print)1012-0394
ISSN (Electronic)1662-9779

Conference

Conference11th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology, GADEST 2005
Country/TerritoryFrance
CityGiens, Marseilles
Period25/09/0530/09/05

Bibliographical note

Publisher Copyright:
© (2005) Trans Tech Publications, Switzerland.

Keywords

  • Defects
  • Light emission
  • Silicon nanostructures
  • Stability

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