Stress evolution in platinum thin films during low-energy ion irradiation

Keyphrases

• Stress Evolution 100%
• Low Energy Ion Irradiation 100%
• Platinum Thin Film 100%
• Stress-induced 50%
• Molecular Dynamics Simulation 50%
• Compressive Stress 50%
• Tensile Stress 50%
• Penetration Depth 25%
• Grain Boundary 25%
• Stress Field 25%
• External Stress 25%
• Heavy Ions 25%
• Anisotropic Diffusion 25%
• Measurement Dynamics 25%
• Bending Measurement 25%
• Defect Clusters 25%
• Noble Gas Ion 25%
• Local Melting 25%
• Ion-induced 25%
• Stress State 25%
• Ion Track 25%
• Cluster Boundary 25%
• Wafer Bending 25%
• Microscopic Mechanism 25%
• Ion Penetration 25%
• Pt Thin Film 25%

Engineering

• Thin Films 100%
• Energy Engineering 66%
• Tensile Stress σ 66%
• Compressive Stress 66%
• Computer Simulation 66%
• Tensiles 33%
• Stress Field 33%
• Initial State 33%
• External Stress 33%
• Anisotropic Diffusion 33%
• High Ion Energy 33%
• Penetration Depth 33%
• Ion Penetration 33%
• Melting Point 33%
• Grain Boundaries 33%

Material Science

• Thin Films 100%
• Platinum 100%
• Ion Bombardment 100%
• Ultimate Tensile Strength 66%
• Stress Field 33%
• Inert Gas 33%
• Grain Boundaries 33%