Super-resolution fluorescence near-field scanning optical microscopy

A. Harootunian*, E. Betzig, M. Isaacson, A. Lewis

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

275 Scopus citations

Abstract

A one-dimensional near-field scanning optical microscope (NSOM) operating in the fluorescence mode has been demonstrated. NSOM line scans of both metallic edges and fluorescent gratings have been obtained and quantitatively compared to both scanning electron micrographs and conventional optical micrographs of the same structures. The sharpness of the near-field scans indicates resolution of <100 nm.

Original languageEnglish
Pages (from-to)674-676
Number of pages3
JournalApplied Physics Letters
Volume49
Issue number11
DOIs
StatePublished - 1986
Externally publishedYes

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