Switching capacity of MEMS tilting micromirrors

Dan M. Marom*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.

Original languageAmerican English
Title of host publication2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages184-185
Number of pages2
DOIs
StatePublished - 2012
Event2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada
Duration: 6 Aug 20129 Aug 2012

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Country/TerritoryCanada
CityBanff, AB
Period6/08/129/08/12

Keywords

  • MEMS
  • Optical switches
  • beam steering

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