Switching capacity of MEMS tilting micromirrors

Dan M. Marom

doi:10.1109/OMEMS.2012.6318864

Switching capacity of MEMS tilting micromirrors

Dan M. Marom^*

^*Corresponding author for this work

Department of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.

Original language	English
Title of host publication	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages	184-185
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2012.6318864
State	Published - 2012
Event	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada Duration: 6 Aug 2012 → 9 Aug 2012

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Country/Territory	Canada
City	Banff, AB
Period	6/08/12 → 9/08/12

Keywords

MEMS
Optical switches
beam steering

Access to Document

10.1109/OMEMS.2012.6318864

Cite this

@inproceedings{3dcb81df794d472ab54ca4f83a66243c,

title = "Switching capacity of MEMS tilting micromirrors",

abstract = "The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.",

keywords = "MEMS, Optical switches, beam steering",

author = "Marom, {Dan M.}",

year = "2012",

doi = "10.1109/OMEMS.2012.6318864",

language = "אנגלית",

isbn = "9781457715112",

series = "International Conference on Optical MEMS and Nanophotonics",

pages = "184--185",

booktitle = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012",

note = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 ; Conference date: 06-08-2012 Through 09-08-2012",

}

Marom, DM 2012, Switching capacity of MEMS tilting micromirrors. in 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012., 6318864, International Conference on Optical MEMS and Nanophotonics, pp. 184-185, 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012, Banff, AB, Canada, 6/08/12. https://doi.org/10.1109/OMEMS.2012.6318864

TY - GEN

T1 - Switching capacity of MEMS tilting micromirrors

AU - Marom, Dan M.

PY - 2012

Y1 - 2012

N2 - The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.

AB - The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.

KW - MEMS

KW - Optical switches

KW - beam steering

UR - http://www.scopus.com/inward/record.url?scp=84869197380&partnerID=8YFLogxK

U2 - 10.1109/OMEMS.2012.6318864

DO - 10.1109/OMEMS.2012.6318864

M3 - ???researchoutput.researchoutputtypes.contributiontobookanthology.conference???

AN - SCOPUS:84869197380

SN - 9781457715112

T3 - International Conference on Optical MEMS and Nanophotonics

SP - 184

EP - 185

BT - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

T2 - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

Y2 - 6 August 2012 through 9 August 2012

ER -

Switching capacity of MEMS tilting micromirrors

Abstract

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Conference

Keywords

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