Abstract
Following conflicting reports concerning the effect of light soaking (LS) on the structure of hydrogenated amorphous silicon (a-Si:H) we have carried out a comprehensive Raman scattering study of this effect on a-Si:H films prepared by different deposition techniques. We have found that first, the LS causes a major rearrangement of atoms as suggested by recent theoretical models. Second, the short-range order decreases upon LS as we expect from the breaking of Si-Si bonds. Third and counterintuitive, the intermediate range order may increase upon LS.
| Original language | English |
|---|---|
| Pages (from-to) | 496-500 |
| Number of pages | 5 |
| Journal | Journal of Non-Crystalline Solids |
| Volume | 266-269 A |
| DOIs | |
| State | Published - 1 May 2000 |
| Event | 18th International Conference on Amorphous and Microcrystalline Semiconductors - Sicence and Technology (ICAMS 18) - Snowbird, UT, United States Duration: 23 Aug 1999 → 27 Aug 1999 |