Thin films of binary metal oxides by chemical vapor deposition from organometallic chelates

Lina Ben-dor; Raymond Druilhe; Pierre Gibart

doi:10.1016/0022-0248(74)90298-X

Thin films of binary metal oxides by chemical vapor deposition from organometallic chelates

Lina Ben-dor^*, Raymond Druilhe, Pierre Gibart

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Thin films of Fe₂O₃ and NiO were epitaxially deposited on single crystals of Al₂O₃ and MgO, respectively, by chemical vapor deposition (CVD) from the respective metal acetylacetonates. Optical absorption spectra of the transparent films in the visible and ultra-violet region are reported.

Original language	English
Pages (from-to)	172-174
Number of pages	3
Journal	Journal of Crystal Growth
Volume	24-25
Issue number	C
DOIs	https://doi.org/10.1016/0022-0248(74)90298-X
State	Published - Oct 1974
Externally published	Yes

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@article{39288e7467fb4dcfb01f2155cb755aa0,

title = "Thin films of binary metal oxides by chemical vapor deposition from organometallic chelates",

abstract = "Thin films of Fe2O3 and NiO were epitaxially deposited on single crystals of Al2O3 and MgO, respectively, by chemical vapor deposition (CVD) from the respective metal acetylacetonates. Optical absorption spectra of the transparent films in the visible and ultra-violet region are reported.",

author = "Lina Ben-dor and Raymond Druilhe and Pierre Gibart",

year = "1974",

month = oct,

doi = "10.1016/0022-0248(74)90298-X",

language = "אנגלית",

volume = "24-25",

pages = "172--174",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier B.V.",

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T1 - Thin films of binary metal oxides by chemical vapor deposition from organometallic chelates

AU - Ben-dor, Lina

AU - Druilhe, Raymond

AU - Gibart, Pierre

PY - 1974/10

Y1 - 1974/10

N2 - Thin films of Fe2O3 and NiO were epitaxially deposited on single crystals of Al2O3 and MgO, respectively, by chemical vapor deposition (CVD) from the respective metal acetylacetonates. Optical absorption spectra of the transparent films in the visible and ultra-violet region are reported.

AB - Thin films of Fe2O3 and NiO were epitaxially deposited on single crystals of Al2O3 and MgO, respectively, by chemical vapor deposition (CVD) from the respective metal acetylacetonates. Optical absorption spectra of the transparent films in the visible and ultra-violet region are reported.

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U2 - 10.1016/0022-0248(74)90298-X

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AN - SCOPUS:4243148221

SN - 0022-0248

VL - 24-25

SP - 172

EP - 174

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - C

ER -

Thin films of binary metal oxides by chemical vapor deposition from organometallic chelates

Abstract

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