We use LOCOS technique to fabricate quasi-planar Silicon nanoantennas which are building blocks for future planar metasurfaces. Antenna arrays are characterized, and their measured optical transmission is shown to match simulations.
|Original language||American English|
|Title of host publication||2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||2|
|State||Published - 25 Oct 2017|
|Event||2017 Conference on Lasers and Electro-Optics, CLEO 2017 - San Jose, United States|
Duration: 14 May 2017 → 19 May 2017
|Name||2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings|
|Conference||2017 Conference on Lasers and Electro-Optics, CLEO 2017|
|Period||14/05/17 → 19/05/17|
Bibliographical notePublisher Copyright:
© 2017 IEEE.