Ultra-high Q silicon resonators in planarized LOCOS

Alex Naiman; Boris Desiatov; Liron Stern; Noa Mazurski; Joseph Shappir; Uriel Levy

doi:10.1109/OMN.2015.7288843

Ultra-high Q silicon resonators in planarized LOCOS

Alex Naiman, Boris Desiatov, Liron Stern, Noa Mazurski, Joseph Shappir, Uriel Levy

Department of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We describe a modified local oxidation of silicon process as a platform for the fabrication of waveguides and ultra-high Quality factor (5.3) silicon resonators, with nearly fully planar interface for multilayer silicon integration.

Original language	English
Title of host publication	OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781467368346
DOIs	https://doi.org/10.1109/OMN.2015.7288843
State	Published - 2 Oct 2015
Event	International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2 Aug 2015 → 5 Aug 2015

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	02-05-August-2015
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	International Conference on Optical MEMS and Nanophotonics, OMN 2015
Country/Territory	Israel
City	Jerusalem
Period	2/08/15 → 5/08/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Access to Document

10.1109/OMN.2015.7288843

Cite this

Naiman, A., Desiatov, B., Stern, L., Mazurski, N., Shappir, J., & Levy, U. (2015). Ultra-high Q silicon resonators in planarized LOCOS. In OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings Article 7288843 (International Conference on Optical MEMS and Nanophotonics; Vol. 02-05-August-2015). IEEE Computer Society. https://doi.org/10.1109/OMN.2015.7288843

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author = "Alex Naiman and Boris Desiatov and Liron Stern and Noa Mazurski and Joseph Shappir and Uriel Levy",

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Naiman, A, Desiatov, B, Stern, L, Mazurski, N, Shappir, J & Levy, U 2015, Ultra-high Q silicon resonators in planarized LOCOS. in OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings., 7288843, International Conference on Optical MEMS and Nanophotonics, vol. 02-05-August-2015, IEEE Computer Society, International Conference on Optical MEMS and Nanophotonics, OMN 2015, Jerusalem, Israel, 2/08/15. https://doi.org/10.1109/OMN.2015.7288843

Ultra-high Q silicon resonators in planarized LOCOS. / Naiman, Alex; Desiatov, Boris; Stern, Liron et al.
OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings. IEEE Computer Society, 2015. 7288843 (International Conference on Optical MEMS and Nanophotonics; Vol. 02-05-August-2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Ultra-high Q silicon resonators in planarized LOCOS

Abstract

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Bibliographical note

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