Ultra-high Q silicon resonators in planarized LOCOS

Alex Naiman; Boris Desiatov; Liron Stern; Noa Mazurski; Joseph Shappir; Uriel Levy

Ultra-high Q silicon resonators in planarized LOCOS

Alex Naiman, Boris Desiatov, Liron Stern, Noa Mazurski, Joseph Shappir, Uriel Levy

Department of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We describe a modified local oxidation of silicon process as a platform for the fabrication of waveguides and ultra-high Quality factor (5.3·10) silicon resonators, with nearly fully planar interface for multilayer silicon integration.

Original language	English
Title of host publication	2015 Conference on Lasers and Electro-Optics, CLEO 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781557529688
State	Published - 10 Aug 2015
Event	Conference on Lasers and Electro-Optics, CLEO 2015 - San Jose, United States Duration: 10 May 2015 → 15 May 2015

Publication series

Name	Conference on Lasers and Electro-Optics Europe - Technical Digest
Volume	2015-August

Conference

Conference	Conference on Lasers and Electro-Optics, CLEO 2015
Country/Territory	United States
City	San Jose
Period	10/05/15 → 15/05/15

Bibliographical note

Publisher Copyright:
© 2015 OSA.

Keywords

Fabrication
Optical resonators
Optical waveguides
Photonics
Q-factor
Silicon
Silicon nitride

Cite this

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title = "Ultra-high Q silicon resonators in planarized LOCOS",

abstract = "We describe a modified local oxidation of silicon process as a platform for the fabrication of waveguides and ultra-high Quality factor (5.3·10) silicon resonators, with nearly fully planar interface for multilayer silicon integration.",

keywords = "Fabrication, Optical resonators, Optical waveguides, Photonics, Q-factor, Silicon, Silicon nitride",

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Naiman, A, Desiatov, B, Stern, L, Mazurski, N, Shappir, J & Levy, U 2015, Ultra-high Q silicon resonators in planarized LOCOS. in 2015 Conference on Lasers and Electro-Optics, CLEO 2015., 7184025, Conference on Lasers and Electro-Optics Europe - Technical Digest, vol. 2015-August, Institute of Electrical and Electronics Engineers Inc., Conference on Lasers and Electro-Optics, CLEO 2015, San Jose, United States, 10/05/15.

Ultra-high Q silicon resonators in planarized LOCOS. / Naiman, Alex; Desiatov, Boris; Stern, Liron et al.
2015 Conference on Lasers and Electro-Optics, CLEO 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 7184025 (Conference on Lasers and Electro-Optics Europe - Technical Digest; Vol. 2015-August).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Desiatov, Boris

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AU - Mazurski, Noa

AU - Shappir, Joseph

AU - Levy, Uriel

PY - 2015/8/10

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KW - Optical resonators

KW - Optical waveguides

KW - Photonics

KW - Q-factor

KW - Silicon

KW - Silicon nitride

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T3 - Conference on Lasers and Electro-Optics Europe - Technical Digest

BT - 2015 Conference on Lasers and Electro-Optics, CLEO 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - Conference on Lasers and Electro-Optics, CLEO 2015

Y2 - 10 May 2015 through 15 May 2015

ER -

Ultra-high Q silicon resonators in planarized LOCOS

Abstract

Publication series

Conference

Bibliographical note

Keywords

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