Ultrahigh-Q silicon resonators in a planarized local oxidation of silicon platform

Alex Naiman*, Boris Desiatov, Liron Stern, Noa Mazurski, Joseph Shappir, Uriel Levy

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

26 Scopus citations


We describe a platform for the fabrication of smooth waveguides and ultrahigh-quality-factor (Q factor) silicon resonators using a modified local oxidation of silicon (LOCOS) technique. Unlike the conventional LOCOS process, our approach allows the fabrication of nearly planarized structures, supporting a multilayer silicon photonics configuration. Using this approach we demonstrate the fabrication and the characterization of a microdisk resonator with an intrinsic Q factor that is one of the highest Q factors achieved with a compact silicon-on-insulator platform.

Original languageAmerican English
Pages (from-to)1892-1895
Number of pages4
JournalOptics Letters
Issue number9
StatePublished - 2015

Bibliographical note

Publisher Copyright:
© 2015 Optical Society of America.


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