Ultrathin silicon nitride microring resonator for biophotonic applications at 970 nm wavelength

Ilya Goykhman, Boris Desiatov, Uriel Levy*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

68 Scopus citations


We experimentally demonstrate a high-Q ultrathin silicon nitride microring resonator operating at wavelength of 970 nm that is favorable for large variety of biophotonic applications. Implementation of thin device layer of 200 nm allows enhanced interaction between the optical mode and environment, while still maintaining high quality factor of resonator. In addition, we show the importance of spectral window around 970 nm to improve device sensing capability.

Original languageAmerican English
Article number081108
JournalApplied Physics Letters
Issue number8
StatePublished - 23 Aug 2010

Bibliographical note

Funding Information:
The authors I.G. and B.D. equally contributed to the work. The authors acknowledge fruitful discussions with Professor Joseph Shappir and a technical support of David Shlosberg and Noa Mazursky. The research was supported in parts by the U.S-Israel Binational Science Foundation, the Israeli Science Foundation and the Peter Brojde Center for Innovative Engineering and Computer Science. The SiN waveguides were fabricated at the Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem.


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