Abstract
The apparatus described operates in the range 10 and 220 nm. By use of a rotating mirror working at grazing incidence, several spatial profiles (between five and ten, depending on plasma lifetime and mirror rotation speed) of two impurity lines are obtained during a single plasma discharge.
| Original language | English |
|---|---|
| Article number | 024 |
| Pages (from-to) | 895-898 |
| Number of pages | 4 |
| Journal | Journal of Physics E: Scientific Instruments |
| Volume | 12 |
| Issue number | 9 |
| DOIs | |
| State | Published - 1979 |
| Externally published | Yes |
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