Abstract
This paper concentrates on results of photoluminescence (PL), Raman scattering and extended X-ray absorption fine structure (EXAFS) investigations of silicon oxide films enriched by Ge. All the spectra were analyzed both for "as prepared" silicon oxide films enriched by Ge (without Ge-quantum dots, QD) and for films after high temperature annealing in inert atmosphere with the aim of creating Ge-nano-crystallites (nc)-quantum dots. Five PL bands were discovered in Ge-SiOx systems. It is shown that the visible PL bands peaked at 1.61-1.65eV (2), 1.75-1.80eV (3), 2.00-2.06eV (4) and 2.25-2.30eV (5) do not correlate with the presence of Ge atoms or Ge-nc in the samples. The nature of the infrared PL band peaked at 1.43-1.52eV is not clear. The intensity of this PL band increases in thermally annealed samples with increasing Ge concentration.
Original language | English |
---|---|
Pages (from-to) | 619-622 |
Number of pages | 4 |
Journal | Journal of Electron Spectroscopy and Related Phenomena |
Volume | 137-140 |
Issue number | SPEC. ISS. |
DOIs | |
State | Published - Jul 2004 |
Keywords
- Ge-SiO layers
- Ge-quantum dots
- Visible photoluminescence