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Wafer-scale, sub-5 nm junction formation by monolayer doping and conventional spike annealing
Johnny C. Ho, Roie Yerushalmi, Gregory Smith, Prashant Majhi, Joseph Bennett, Jeffri Halim, Vladimir N. Faifer, Ali Javey*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
145
Scopus
citations