Wavefront reconstruction by spatial-phase-shift imaging interferometry

Shay Wolfling*, Emmanuel Lanzmann, Nissim Ben-Yosef, Yoel Arieli

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Common-path imaging interferometers offer some advantages over other interferometers, such as insensitivity to vibrations and the ability to be attached to any optical system to analyze an imaged wavefront. We introduce the spatial-phase-shift imaging interferometry technique for surface measurements and wavefront analysis in which different parts of the wavefront undergo certain manipulations in a certain plane along the optical axis. These manipulations replace the reference-beam phase shifting of existing interferometry methods. We present the mathematical algorithm for reconstructing the wavefront from the interference patterns and detail the optical considerations for implementing the optical system. We implemented the spatial phase shift into a working system and used it to measure a variety of objects. Measurement results and comparison with other measurement methods indicate that this approach improves measurement accuracy with respect to existing quantitative phase-measurement methods.

Original languageEnglish
Pages (from-to)2586-2596
Number of pages11
JournalApplied Optics
Volume45
Issue number12
DOIs
StatePublished - 20 Apr 2006

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